Ion bombardment and ion-assisted etching in rf discharges / Albert Manenschijn
Proefschrift Delft
| rdfs:label | "Ion bombardment and ion-assisted etching in rf discharges / Albert Manenschijn" |
| schema:name | "Ion bombardment and ion-assisted etching in rf discharges" |
| schema:author | Manenschijn, Albert (1963-) |
| schema:description | "Proefschrift Delft" |
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schema:same |
<http:/ |
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schema:main |
<https:/ |
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http:/ |
"1991" |
| schema:about | ionen |
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<http:/ |
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| Plasma's | |
| etstechniek | |
| Engraving | |
| Carona discharges | |
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schema:in |
"en" |
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schema:number |
147 |
| schema:publication |
<https:/ |