Ion bombardment and ion-assisted etching in rf discharges / Albert Manenschijn
type: CreativeWork
type: ProductModel
type: Book
description: Proefschrift Delft
main entity of page: https://data.bibliotheken.nl/.well-known/genid/84a2edcfb73abce28f98c3d8d81fcf52
name: Ion bombardment and ion-assisted etching in rf discharges
about: p075653370
about: p077612884
about: p078629349
about: p075605562
about: p078500699
about: p078512107
author: p08682791X
language: en
number of pages: 147
issued: 1991