Investigations on an RF-plasma related to plasma etching / door Theodorus Hubertus Josephus Bisschops
Proefschrift Eindhoven
| rdfs:label | "Investigations on an RF-plasma related to plasma etching / door Theodorus Hubertus Josephus Bisschops" |
| schema:name | "Investigations on an RF-plasma related to plasma etching" |
| schema:author | Bisschops, Theodorus Hubertus Josephus (1956-2010) |
| schema:description | "Proefschrift Eindhoven" |
|
schema:same |
<http:/ |
|
schema:main |
<https:/ |
|
http:/ |
"1987" |
| schema:about | Excitation |
| Koolstoftetrafluoride | |
| plasmafysica | |
| Microelectronics | |
| Engraving | |
| Plasma's | |
|
schema:in |
"en" |
|
schema:number |
116 |
| schema:publication |
<https:/ |