Investigations on an RF-plasma related to plasma etching / door Theodorus Hubertus Josephus Bisschops
type: Book
type: CreativeWork
type: ProductModel
issued: 1987
about: p075662914
about: p078500699
about: p078501970
about: p078563925
about: p078590205
about: p078629349
author: p072920521
description: Proefschrift Eindhoven
language: en
main entity of page: https://data.bibliotheken.nl/.well-known/genid/6dfe4c637f92af2a4efb777a3962a700
name: Investigations on an RF-plasma related to plasma etching
number of pages: 116