Microcircuit engineering 1980 : proceedings of the International conference on microlithography September 30, October 1-2, 1980 Amsterdam The Netherlands / ed. by Roel P. Kramer
| rdfs:label | "Microcircuit engineering 1980 : proceedings of the International conference on microlithography September 30, October 1-2, 1980 Amsterdam The Netherlands / ed. by Roel P. Kramer" |
| schema:name | "Microcircuit engineering 1980 : proceedings of the International conference on microlithography September 30, October 1-2, 1980 Amsterdam The Netherlands" |
| schema:contributor | Kramer, Roel P. |
|
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<http:/ |
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schema:main |
<https:/ |
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"1981" |
| schema:about | lithograferen |
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schema:in |
"en" |
| schema:isbn | "9062750605" |
|
schema:number |
566 |
| schema:publication |
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