Microcircuit engineering 1980 : proceedings of the International conference on microlithography September 30, October 1-2, 1980 Amsterdam The Netherlands / ed. by Roel P. Kramer
type: Book
type: CreativeWork
type: ProductModel
issued: 1981
about: p075614065
contributor: p072906472
language: en
isbn: 9062750605
main entity of page: https://data.bibliotheken.nl/.well-known/genid/c3f8ee7d50a3e12492afc7fd50077c84
name: Microcircuit engineering 1980 : proceedings of the International conference on microlithography September 30, October 1-2, 1980 Amsterdam The Netherlands
number of pages: 566