schema:identifier
<neef5bd3430c14681a801e3af1f13bbb9b3>

schema:propertyID "NL-AmRIJ"
schema:value "321369"

schema:about
<neef5bd3430c14681a801e3af1f13bbb9b2>

schema:alternateName "Photolithography"

schema:about
<neef5bd3430c14681a801e3af1f13bbb9b1>

schema:alternateName "Lithography--Technique"

Inverse relations

[ .. ] → schema:exampleOfWork → Practical lithography

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