Combined electromagnetic suspension and propulsion for positioning with sub-micrometer accuracy / Frank Auer

Proefschrift Technische Universiteit Delft
rdfs:label "Combined electromagnetic suspension and propulsion for positioning with sub-micrometer accuracy / Frank Auer"
schema:name "Combined electromagnetic suspension and propulsion for positioning with sub-micrometer accuracy"
schema:author Auer, Frank (1967-)
schema:description "Proefschrift Technische Universiteit Delft"
schema:sameAs <http://www.worldcat.org/oclc/905475154>
schema:mainEntityOfPage <https://data.bibliotheken.nl/.well-known/genid/ec05d467de8e12e617a0db4f271d9fd9>
http://purl.org/dc/terms#issued "1995"
schema:about elektromagnetisme
aandrijftechniek
schema:inLanguage "en"
schema:isbn "9040711933"
schema:numberOfPages 155
schema:publication <https://data.bibliotheken.nl/.well-known/genid/49a596424059715c14a098dbc68b8820>