Laser plasma soft x-ray sources, application in microlithography / Fred Bijkerk
Proefschrift Vrije Universiteit Amsterdam
| rdfs:label | "Laser plasma soft x-ray sources, application in microlithography / Fred Bijkerk" |
| schema:name | "Laser plasma soft x-ray sources, application in microlithography" |
| schema:author | Bijkerk, Fred |
| schema:description | "Proefschrift Vrije Universiteit Amsterdam" |
|
schema:same |
<http:/ |
|
schema:main |
<https:/ |
|
http:/ |
"1993" |
| schema:about | Microlithography |
| X-rays | |
| lithograferen | |
| lasers | |
|
<http:/ |
|
| Lasertechniek | |
| halfgeleiders | |
| Plasma's | |
|
schema:in |
"en" |
|
schema:number |
127 |
| schema:publication |
<https:/ |