Design considerations for very high speed electron beam writing / Jan Simons
Proefschrift Technische Universiteit Delft
| rdfs:label | "Design considerations for very high speed electron beam writing / Jan Simons" |
| schema:name | "Design considerations for very high speed electron beam writing" |
| schema:author | Simons, Jan (1937-2009 ; natuurkundige) |
| schema:description | "Proefschrift Technische Universiteit Delft" |
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schema:same |
<http:/ |
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schema:main |
<https:/ |
|
http:/ |
"1992" |
| schema:about | Electron tubes |
| elektronenbuizen | |
| Lithografie | |
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<http:/ |
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schema:in |
"en" |
| schema:isbn | "9062757758" |
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schema:number |
277 |
| schema:publication |
<https:/ |