Engineering of damage in ion implanted silicon / Jan Reinder Liefting
Auteursnaam op omslag: Reinoud Liefting
| rdfs:label | "Engineering of damage in ion implanted silicon / Jan Reinder Liefting" |
| schema:name | "Engineering of damage in ion implanted silicon" |
| schema:author | Liefting, Jan Reinder (1962-) |
| schema:description | "Auteursnaam op omslag: Reinoud Liefting" |
| "Proefschrift Enschede" | |
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schema:same |
<http:/ |
|
schema:main |
<https:/ |
|
http:/ |
"1992" |
| schema:about | Ionic implantation |
| halfgeleiders | |
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<http:/ |
|
| Lattice defects | |
| Silicon | |
| ionen | |
|
schema:in |
"en" |
| schema:isbn | "9090050973" |
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schema:number |
104 |
| schema:publication |
<https:/ |