Microcircuit engineering 90 : proceedings of the International Conference on Microlithography, September 18-20, 1990 Leuven, Belgium / ed. by G. Declerck, L. Van den hove, F. Coopmans
| rdfs:label | "Microcircuit engineering 90 : proceedings of the International Conference on Microlithography, September 18-20, 1990 Leuven, Belgium / ed. by G. Declerck, L. Van den hove, F. Coopmans" |
| schema:name | "Microcircuit engineering 90 : proceedings of the International Conference on Microlithography, September 18-20, 1990 Leuven, Belgium" |
| schema:contributor | Declerck, G. |
| Van den Hove, L. | |
|
schema:same |
<http:/ |
|
schema:main |
<https:/ |
|
http:/ |
"1991" |
| schema:about | halfgeleiders |
| chips | |
| lithograferen | |
|
schema:in |
"en" |
| schema:isbn | "0444890874" |
|
schema:number |
573 |
| schema:publication |
<https:/ |