High energy ion implantation for merged silicon technologies / Rutger Cornelis Marinus Wijburg

<http://data.bibliotheken.nl/id/nbt/p064320650>

Proefschrift Enschede

rdfs:label	"High energy ion implantation for merged silicon technologies / Rutger Cornelis Marinus Wijburg"
schema:name	"High energy ion implantation for merged silicon technologies"
schema:author	Wijburg, Rutger Cornelis Marinus (1962-)
schema:description	"Proefschrift Enschede"
schema:sameAs	<http://www.worldcat.org/oclc/65499043>
schema:mainEntityOfPage	<https://data.bibliotheken.nl/.well-known/genid/fd5822a64cab441db3b0fa7c1d7409d4>
http://purl.org/dc/terms#issued	"1990"
schema:about	<http://data.bibliotheken.nl/id/thes/p077604962>
	Ionic implantation
	ionen
	Twente (Enschede)
	Microelectronics
	CMOS
	elektronische schakelingen
schema:inLanguage	"en"
schema:isbn	"909003627X"
schema:numberOfPages	168
schema:publication	<https://data.bibliotheken.nl/.well-known/genid/0a9d0389b860bfa45d41eed53be5a601>