Hydrogenated amorphous and microcrystalline silicon deposited from silane-hydrogen mixtures / Ronald Cornelis van Oort
Proefschrift Technische Universiteit Delft
| rdfs:label | "Hydrogenated amorphous and microcrystalline silicon deposited from silane-hydrogen mixtures / Ronald Cornelis van Oort" |
| schema:name | "Hydrogenated amorphous and microcrystalline silicon deposited from silane-hydrogen mixtures" |
| schema:author | Oort, Ronald Cornelis van (1959-) |
| schema:description | "Proefschrift Technische Universiteit Delft" |
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schema:same |
<http:/ |
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schema:main |
<https:/ |
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http:/ |
"1989" |
| schema:about | Dunne films |
| Plasma's | |
| anorganische chemie | |
| Silanen | |
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<http:/ |
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| Silicon | |
| Kristalgroei | |
| Waterstof | |
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schema:in |
"en" |
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schema:number |
120 |
| schema:publication |
<https:/ |