Microelectronic engineering : an international journal of semiconductor manufacturing technology
type: Periodical
type: CreativeWork
type: ProductModel
main entity of page: https://data.bibliotheken.nl/.well-known/genid/3b6b4ae07f7ac08522ca78f93d1b36d8
about: p077606507
about: p075615223
genre: p075624893
language: en
has derivative: p185201660
associated media: http://www.sciencedirect.com/science/journal/01679317
issn: 01679317
issued: 1983