Microelectronic engineering : nanotechnology and processing : electronics, photonics, MEMS and life sciences
type: CreativeWork
type: Periodical
type: ProductModel
issued: 199X
about: p095980628
about: p077604946
about: p078590205
about: p075615223
associated media: http://www.sciencedirect.com/science/journal/01679317
genre: p075624893
language: en
is based on: p841015821
issn: 18735568
main entity of page: https://data.bibliotheken.nl/.well-known/genid/850b46a6c4041fd91cfec109bd8c7933